Show
1 citations
related to Koyama, Shunshi
Show
1 citations
related to Koyama, Shunshi as an author
Article
Koyama, Shunshi
(2007)
Variable Shaped Electron Beam Lithography for Fabrication of Very Large-Scale Integrated Circuits: An Example of Research and Development in the Information Science Laboratory, The Institute of Phsycial and Chemical Research.
科学史研究 Kagakusi Kenkyu (History of Science)
(p. 155).
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